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Cleanroom Kawasaki NS511

NS series robots designed for the cleanroom application NS511 (Ceiling mount with flip) with RTZ movement with optional lengths of a linear axis for an additional FOUP range. They provide high performance in the handling of 300mm wafers. The software and hardware are equipped with collision detection functions and comply with the SEMI F47 voltage exoneration standards and SEMI S2 environmental, health and safety standards.

Controller D
D controllers are designed to develop clean room applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, white room ISO 1.
Specification of the D60 controller
Specification of the D61 controller
Main specifications
 
Number of axis: 4
ISO Class 5
Repeatability:  ± 0.1 mm (wafer center)
Controller: D60/D61
 
Motion range (°)
 
Y axis (travel JT1): -
θ axis (rotation JT2): 473°
Z axis (up-down JT3): 440 mm
X axis (up-down JT4): 816.5 mm
F axis (rotation JT5): 200°
 
Robot applications
 
Cleanroom

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