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Kawasaki NT510 cleanroom

NT series robots designed for the single arm NT510 clean room application can achieve up to four FOUPs, which provide standard performance of 280 wafers per hour (WPH) with aligner and 400 WPH without aligner. The software and hardware are equipped with collision detection functions and comply with the SEMI F47 voltage exoneration standards and SEMI S2 environmental, health and safety standards.

Controller D60
D controllers are designed to develop cleanroom applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, ISO 1 white room.
Spcifications of the D60 controller
Specification of the D61 controller
Main specifications
 
Number of axis: 4
Maximum l reach: 1,230 mm
Repeatability:  ± 0.1 mm (wafer center)
Controller: D60/D61
 
Motion range (°)
 
θ1 axis (rotation JT2): 340°
Z axis (up-down JT3): 470 mm
θ2 axis (rotation JT4): 340°
H1 axis (rotation JT6): 340° (380°) como opción
H2 axis (rotation JT7): - 
 
Robot applications
 
Cleanroom

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