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Kawasaki Cleanroom NX510

The NX510 is a robot that has a rigid arm structure that can easily reach the stages of the wafers with a tight space, as well as the FOUP in arbitrary positions. can use with 2 or 3 FOUP without a track, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when the voltage is restored, standard SEMI-S2 protection to the environment and personal safety, anti-collision system, high linearity, positioning and great precision.

Controller D
D controllers are designed to develop clean room applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, white room ISO 1.
Specification of the D60 controller
Specification of the D61 controller

Main specifications

Number of axis: 4
ISO Class 1
Link: 2
Repeatability:  ± 0.1 mm (wafer center)
Controller: D60/D61
 
Motion range (°)
 
θ axis
(rotation JT2)
330°
440 mm
Z axis
(up-down JT3)
832 mm
336°
X axis
(in/out JT4)
 
W axis - lower
 (rotation JT6)
-
W axis - upper
(rotation JT7)
 

Robot applications

Cleanroom

Awaiting more stock

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