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Kawasaki Cleanroom NX520

The NX520 with 2 links, rigid double arm structure that can easily reach the wafer stages with a high performance space of 200 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double arm manipulator, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when voltage is restored, standard SEMI-S2 environmental protection, personal safety, anti-collision system.

Controller D
D controllers are designed to develop clean room applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, white room ISO 1.
Specification of the D60 controller
Specification of the D61 controller
Main specifications
 
Number of axis: 5
ISO Class 1
Link: 2
Repeatability:  ± 0.1 mm (wafer center)
Controller: D60/D61
 
Motion range (°)
 
θ axis
(rotation JT2)
330°
440 mm
Z axis
(up-down JT3)
832 mm
336°
X axis
(in/out JT4)
 
W axis - lower
 (rotation JT6)
336 °
W axis - upper
(rotation JT7)
 

Robot applications

Cleanroom

 


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